11/6/2012	1:53:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2012	1:53:16 PM	Recipe started at 1:53 PM
11/6/2012	1:53:16 PM	Helium valve closed
11/6/2012	1:53:16 PM	H2 valve closed
11/6/2012	1:53:16 PM	BCl3 valve closed
11/6/2012	1:53:16 PM	PH3 valve closed
11/6/2012	1:53:16 PM	SiCl4 pre valve closed
11/6/2012	1:53:16 PM	SiCl4 post valve closed
11/6/2012	1:53:16 PM	Main Vac valve closed
11/6/2012	1:53:16 PM	Bypass valve closed
11/6/2012	1:53:16 PM	Bubbler valve closed
11/6/2012	1:53:16 PM	Helium MFC set to  0.000000
11/6/2012	1:53:16 PM	H2 MFC set to  0.000000
11/6/2012	1:53:16 PM	BCl3 MFC set to  0.000000
11/6/2012	1:53:16 PM	PH3 MFC set to  0.000000
11/6/2012	1:53:16 PM	SiCl4 MFC set to  0.000000
11/6/2012	1:53:16 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	1:53:16 PM	Tube furnace set to 0
11/6/2012	1:53:19 PM	H2 valve closed
11/6/2012	1:53:19 PM	BCl3 valve closed
11/6/2012	1:53:19 PM	PH3 valve closed
11/6/2012	1:53:19 PM	SiCl4 pre valve closed
11/6/2012	1:53:19 PM	SiCl4 post valve closed
11/6/2012	1:53:19 PM	Main Vac valve closed
11/6/2012	1:53:19 PM	Bypass valve closed
11/6/2012	1:53:19 PM	Bubbler valve closed
11/6/2012	1:53:20 PM	Helium valve opened
11/6/2012	1:53:20 PM	Helium MFC set to  500.000000
11/6/2012	1:53:20 PM	H2 MFC set to  0.000000
11/6/2012	1:53:20 PM	BCl3 MFC set to  0.000000
11/6/2012	1:53:20 PM	PH3 MFC set to  0.000000
11/6/2012	1:53:20 PM	SiCl4 MFC set to  0.000000
11/6/2012	1:53:20 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	1:53:20 PM	Tube furnace set to 0
11/6/2012	1:54:32 PM	Helium valve closed
11/6/2012	1:54:32 PM	H2 valve closed
11/6/2012	1:54:32 PM	BCl3 valve closed
11/6/2012	1:54:32 PM	PH3 valve closed
11/6/2012	1:54:32 PM	SiCl4 pre valve closed
11/6/2012	1:54:32 PM	SiCl4 post valve closed
11/6/2012	1:54:32 PM	Main Vac valve closed
11/6/2012	1:54:32 PM	Bypass valve closed
11/6/2012	1:54:32 PM	Bubbler valve closed
11/6/2012	1:54:32 PM	Helium MFC set to  0.000000
11/6/2012	1:54:32 PM	H2 MFC set to  0.000000
11/6/2012	1:54:33 PM	BCl3 MFC set to  0.000000
11/6/2012	1:54:33 PM	PH3 MFC set to  0.000000
11/6/2012	1:54:33 PM	SiCl4 MFC set to  0.000000
11/6/2012	1:54:33 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	1:54:33 PM	Tube furnace set to 0
11/6/2012	1:54:34 PM	Run finished at 1:54 PM
11/6/2012	1:54:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2012	2:00:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2012	2:00:52 PM	Recipe started at 2:00 PM
11/6/2012	2:00:52 PM	Helium valve closed
11/6/2012	2:00:52 PM	H2 valve closed
11/6/2012	2:00:52 PM	BCl3 valve closed
11/6/2012	2:00:53 PM	PH3 valve closed
11/6/2012	2:00:53 PM	SiCl4 pre valve closed
11/6/2012	2:00:53 PM	SiCl4 post valve closed
11/6/2012	2:00:53 PM	Main Vac valve closed
11/6/2012	2:00:53 PM	Bubbler valve closed
11/6/2012	2:00:53 PM	Bypass valve opened
11/6/2012	2:00:53 PM	Helium MFC set to  0.000000
11/6/2012	2:00:53 PM	H2 MFC set to  0.000000
11/6/2012	2:00:53 PM	BCl3 MFC set to  0.000000
11/6/2012	2:00:53 PM	PH3 MFC set to  0.000000
11/6/2012	2:00:53 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:00:53 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:00:53 PM	Tube furnace set to 0
11/6/2012	2:02:09 PM	Helium valve closed
11/6/2012	2:02:09 PM	H2 valve closed
11/6/2012	2:02:09 PM	BCl3 valve closed
11/6/2012	2:02:10 PM	PH3 valve closed
11/6/2012	2:02:10 PM	SiCl4 pre valve closed
11/6/2012	2:02:10 PM	SiCl4 post valve closed
11/6/2012	2:02:10 PM	Main Vac valve closed
11/6/2012	2:02:10 PM	Bubbler valve closed
11/6/2012	2:02:10 PM	Bypass valve opened
11/6/2012	2:02:10 PM	Helium MFC set to  0.000000
11/6/2012	2:02:10 PM	H2 MFC set to  0.000000
11/6/2012	2:02:10 PM	BCl3 MFC set to  0.000000
11/6/2012	2:02:10 PM	PH3 MFC set to  0.000000
11/6/2012	2:02:10 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:02:10 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:02:10 PM	Tube furnace set to 0
11/6/2012	2:03:10 PM	Helium valve closed
11/6/2012	2:03:10 PM	H2 valve closed
11/6/2012	2:03:10 PM	BCl3 valve closed
11/6/2012	2:03:10 PM	PH3 valve closed
11/6/2012	2:03:10 PM	SiCl4 pre valve closed
11/6/2012	2:03:10 PM	SiCl4 post valve closed
11/6/2012	2:03:10 PM	Bypass valve closed
11/6/2012	2:03:10 PM	Bubbler valve closed
11/6/2012	2:03:10 PM	Main Vac valve opened
11/6/2012	2:03:10 PM	Helium MFC set to  0.000000
11/6/2012	2:03:10 PM	H2 MFC set to  0.000000
11/6/2012	2:03:10 PM	BCl3 MFC set to  0.000000
11/6/2012	2:03:10 PM	PH3 MFC set to  0.000000
11/6/2012	2:03:10 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:03:10 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:03:10 PM	Tube furnace set to 0
11/6/2012	2:03:11 PM	Run finished at 2:03 PM
11/6/2012	2:03:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2012	2:21:01 PM	Helium MFC set to  10.000000
11/6/2012	2:21:04 PM	Helium valve opened
11/6/2012	2:21:12 PM	Helium valve closed
11/6/2012	2:21:16 PM	Helium MFC set to  0.000000
11/6/2012	2:25:36 PM	Tube furnace set to 50
11/6/2012	2:53:44 PM	Main Vac valve closed
11/6/2012	2:54:07 PM	Main Vac valve opened
11/6/2012	2:55:33 PM	Recipe started at 2:55 PM
11/6/2012	2:55:33 PM	Helium valve closed
11/6/2012	2:55:33 PM	H2 valve closed
11/6/2012	2:55:33 PM	BCl3 valve closed
11/6/2012	2:55:33 PM	PH3 valve closed
11/6/2012	2:55:33 PM	SiCl4 pre valve closed
11/6/2012	2:55:33 PM	SiCl4 post valve closed
11/6/2012	2:55:33 PM	Main Vac valve closed
11/6/2012	2:55:33 PM	Bypass valve closed
11/6/2012	2:55:33 PM	Bubbler valve closed
11/6/2012	2:55:33 PM	Helium MFC set to  0.000000
11/6/2012	2:55:33 PM	H2 MFC set to  0.000000
11/6/2012	2:55:33 PM	BCl3 MFC set to  0.000000
11/6/2012	2:55:33 PM	PH3 MFC set to  0.000000
11/6/2012	2:55:33 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:55:33 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:55:33 PM	Tube furnace set to 0
11/6/2012	2:55:36 PM	Helium valve closed
11/6/2012	2:55:36 PM	BCl3 valve closed
11/6/2012	2:55:36 PM	PH3 valve closed
11/6/2012	2:55:36 PM	SiCl4 pre valve closed
11/6/2012	2:55:36 PM	SiCl4 post valve closed
11/6/2012	2:55:36 PM	Main Vac valve closed
11/6/2012	2:55:36 PM	Bypass valve closed
11/6/2012	2:55:36 PM	Bubbler valve closed
11/6/2012	2:55:36 PM	H2 valve opened
11/6/2012	2:55:36 PM	Helium MFC set to  0.000000
11/6/2012	2:55:36 PM	H2 MFC set to  500.000000
11/6/2012	2:55:36 PM	BCl3 MFC set to  0.000000
11/6/2012	2:55:36 PM	PH3 MFC set to  0.000000
11/6/2012	2:55:36 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:55:36 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:55:36 PM	Tube furnace set to 0
11/6/2012	2:56:52 PM	Helium valve closed
11/6/2012	2:56:52 PM	BCl3 valve closed
11/6/2012	2:56:52 PM	PH3 valve closed
11/6/2012	2:56:52 PM	SiCl4 pre valve closed
11/6/2012	2:56:52 PM	SiCl4 post valve closed
11/6/2012	2:56:52 PM	Main Vac valve closed
11/6/2012	2:56:52 PM	Bypass valve closed
11/6/2012	2:56:52 PM	H2 valve opened
11/6/2012	2:56:52 PM	Bubbler valve opened
11/6/2012	2:56:52 PM	Helium MFC set to  0.000000
11/6/2012	2:56:52 PM	H2 MFC set to  500.000000
11/6/2012	2:56:52 PM	BCl3 MFC set to  0.000000
11/6/2012	2:56:52 PM	PH3 MFC set to  0.000000
11/6/2012	2:56:52 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:56:52 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:56:52 PM	Tube furnace set to 0
11/6/2012	2:56:53 PM	Helium valve closed
11/6/2012	2:56:53 PM	BCl3 valve closed
11/6/2012	2:56:53 PM	PH3 valve closed
11/6/2012	2:56:53 PM	SiCl4 pre valve closed
11/6/2012	2:56:53 PM	SiCl4 post valve closed
11/6/2012	2:56:53 PM	Main Vac valve closed
11/6/2012	2:56:53 PM	Bypass valve closed
11/6/2012	2:56:53 PM	H2 valve opened
11/6/2012	2:56:53 PM	Bubbler valve opened
11/6/2012	2:56:53 PM	Helium MFC set to  0.000000
11/6/2012	2:56:53 PM	H2 MFC set to  500.000000
11/6/2012	2:56:53 PM	BCl3 MFC set to  0.000000
11/6/2012	2:56:53 PM	PH3 MFC set to  0.000000
11/6/2012	2:56:53 PM	SiCl4 MFC set to  0.000000
11/6/2012	2:56:53 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	2:56:53 PM	Tube furnace set to 1000
11/6/2012	3:16:53 PM	Helium valve closed
11/6/2012	3:16:53 PM	PH3 valve closed
11/6/2012	3:16:53 PM	Main Vac valve closed
11/6/2012	3:16:53 PM	Bypass valve closed
11/6/2012	3:16:53 PM	H2 valve opened
11/6/2012	3:16:53 PM	BCl3 valve opened
11/6/2012	3:16:53 PM	SiCl4 pre valve opened
11/6/2012	3:16:53 PM	SiCl4 post valve opened
11/6/2012	3:16:53 PM	Bubbler valve opened
11/6/2012	3:16:53 PM	Helium MFC set to  0.000000
11/6/2012	3:16:53 PM	H2 MFC set to  450.000000
11/6/2012	3:16:53 PM	BCl3 MFC set to  1.000000
11/6/2012	3:16:53 PM	PH3 MFC set to  0.000000
11/6/2012	3:16:53 PM	SiCl4 MFC set to  50.000000
11/6/2012	3:16:53 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	3:16:53 PM	Tube furnace set to 1000
11/6/2012	3:33:53 PM	Helium valve closed
11/6/2012	3:33:53 PM	BCl3 valve closed
11/6/2012	3:33:53 PM	PH3 valve closed
11/6/2012	3:33:53 PM	SiCl4 pre valve closed
11/6/2012	3:33:53 PM	SiCl4 post valve closed
11/6/2012	3:33:53 PM	Main Vac valve closed
11/6/2012	3:33:53 PM	Bypass valve closed
11/6/2012	3:33:53 PM	H2 valve opened
11/6/2012	3:33:53 PM	Bubbler valve opened
11/6/2012	3:33:53 PM	Helium MFC set to  0.000000
11/6/2012	3:33:53 PM	H2 MFC set to  500.000000
11/6/2012	3:33:53 PM	BCl3 MFC set to  0.000000
11/6/2012	3:33:53 PM	PH3 MFC set to  0.000000
11/6/2012	3:33:53 PM	SiCl4 MFC set to  0.000000
11/6/2012	3:33:53 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	3:33:54 PM	Tube furnace set to 750
11/6/2012	3:38:54 PM	H2 valve closed
11/6/2012	3:38:54 PM	BCl3 valve closed
11/6/2012	3:38:54 PM	PH3 valve closed
11/6/2012	3:38:54 PM	SiCl4 pre valve closed
11/6/2012	3:38:54 PM	SiCl4 post valve closed
11/6/2012	3:38:54 PM	Main Vac valve closed
11/6/2012	3:38:54 PM	Bypass valve closed
11/6/2012	3:38:54 PM	Helium valve opened
11/6/2012	3:38:54 PM	Bubbler valve opened
11/6/2012	3:38:54 PM	Helium MFC set to  500.000000
11/6/2012	3:38:54 PM	H2 MFC set to  0.000000
11/6/2012	3:38:54 PM	BCl3 MFC set to  0.000000
11/6/2012	3:38:54 PM	PH3 MFC set to  0.000000
11/6/2012	3:38:54 PM	SiCl4 MFC set to  0.000000
11/6/2012	3:38:54 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	3:38:54 PM	Tube furnace set to 0
11/6/2012	3:58:54 PM	Helium valve closed
11/6/2012	3:58:54 PM	H2 valve closed
11/6/2012	3:58:54 PM	BCl3 valve closed
11/6/2012	3:58:54 PM	PH3 valve closed
11/6/2012	3:58:54 PM	SiCl4 pre valve closed
11/6/2012	3:58:54 PM	SiCl4 post valve closed
11/6/2012	3:58:54 PM	Main Vac valve closed
11/6/2012	3:58:54 PM	Bypass valve closed
11/6/2012	3:58:54 PM	Bubbler valve closed
11/6/2012	3:58:54 PM	Helium MFC set to  0.000000
11/6/2012	3:58:54 PM	H2 MFC set to  0.000000
11/6/2012	3:58:54 PM	BCl3 MFC set to  0.000000
11/6/2012	3:58:54 PM	PH3 MFC set to  0.000000
11/6/2012	3:58:54 PM	SiCl4 MFC set to  0.000000
11/6/2012	3:58:54 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	3:58:54 PM	Tube furnace set to 0
11/6/2012	3:58:55 PM	Run finished at 3:58 PM
11/6/2012	4:06:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2012	4:06:17 PM	Recipe started at 4:06 PM
11/6/2012	4:06:17 PM	Helium valve closed
11/6/2012	4:06:17 PM	H2 valve closed
11/6/2012	4:06:17 PM	BCl3 valve closed
11/6/2012	4:06:17 PM	PH3 valve closed
11/6/2012	4:06:17 PM	SiCl4 pre valve closed
11/6/2012	4:06:17 PM	SiCl4 post valve closed
11/6/2012	4:06:17 PM	Main Vac valve closed
11/6/2012	4:06:17 PM	Bubbler valve closed
11/6/2012	4:06:17 PM	Bypass valve opened
11/6/2012	4:06:17 PM	Helium MFC set to  0.000000
11/6/2012	4:06:17 PM	H2 MFC set to  0.000000
11/6/2012	4:06:17 PM	BCl3 MFC set to  0.000000
11/6/2012	4:06:17 PM	PH3 MFC set to  0.000000
11/6/2012	4:06:17 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:06:17 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:06:17 PM	Tube furnace set to 0
11/6/2012	4:07:31 PM	Helium valve closed
11/6/2012	4:07:31 PM	H2 valve closed
11/6/2012	4:07:31 PM	BCl3 valve closed
11/6/2012	4:07:31 PM	PH3 valve closed
11/6/2012	4:07:31 PM	SiCl4 pre valve closed
11/6/2012	4:07:31 PM	SiCl4 post valve closed
11/6/2012	4:07:31 PM	Main Vac valve closed
11/6/2012	4:07:31 PM	Bubbler valve closed
11/6/2012	4:07:31 PM	Bypass valve opened
11/6/2012	4:07:31 PM	Helium MFC set to  0.000000
11/6/2012	4:07:31 PM	H2 MFC set to  0.000000
11/6/2012	4:07:31 PM	BCl3 MFC set to  0.000000
11/6/2012	4:07:31 PM	PH3 MFC set to  0.000000
11/6/2012	4:07:31 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:07:31 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:07:31 PM	Tube furnace set to 0
11/6/2012	4:08:31 PM	Helium valve closed
11/6/2012	4:08:31 PM	H2 valve closed
11/6/2012	4:08:31 PM	BCl3 valve closed
11/6/2012	4:08:31 PM	PH3 valve closed
11/6/2012	4:08:31 PM	SiCl4 pre valve closed
11/6/2012	4:08:31 PM	SiCl4 post valve closed
11/6/2012	4:08:31 PM	Bypass valve closed
11/6/2012	4:08:31 PM	Bubbler valve closed
11/6/2012	4:08:31 PM	Main Vac valve opened
11/6/2012	4:08:31 PM	Helium MFC set to  0.000000
11/6/2012	4:08:31 PM	H2 MFC set to  0.000000
11/6/2012	4:08:31 PM	BCl3 MFC set to  0.000000
11/6/2012	4:08:31 PM	PH3 MFC set to  0.000000
11/6/2012	4:08:31 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:08:31 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:08:31 PM	Tube furnace set to 0
11/6/2012	4:08:32 PM	Run finished at 4:08 PM
11/6/2012	4:08:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2012	4:22:44 PM	Main Vac valve closed
11/6/2012	4:22:57 PM	Main Vac valve opened
11/6/2012	4:49:31 PM	Main Vac valve closed
11/6/2012	4:49:55 PM	Main Vac valve opened
11/6/2012	4:51:23 PM	Recipe started at 4:51 PM
11/6/2012	4:51:23 PM	Helium valve closed
11/6/2012	4:51:23 PM	H2 valve closed
11/6/2012	4:51:23 PM	BCl3 valve closed
11/6/2012	4:51:23 PM	PH3 valve closed
11/6/2012	4:51:24 PM	SiCl4 pre valve closed
11/6/2012	4:51:24 PM	SiCl4 post valve closed
11/6/2012	4:51:24 PM	Main Vac valve closed
11/6/2012	4:51:24 PM	Bypass valve closed
11/6/2012	4:51:24 PM	Bubbler valve closed
11/6/2012	4:51:24 PM	Helium MFC set to  0.000000
11/6/2012	4:51:24 PM	H2 MFC set to  0.000000
11/6/2012	4:51:24 PM	BCl3 MFC set to  0.000000
11/6/2012	4:51:24 PM	PH3 MFC set to  0.000000
11/6/2012	4:51:24 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:51:24 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:51:24 PM	Tube furnace set to 0
11/6/2012	4:51:27 PM	Helium valve closed
11/6/2012	4:51:27 PM	BCl3 valve closed
11/6/2012	4:51:27 PM	PH3 valve closed
11/6/2012	4:51:27 PM	SiCl4 pre valve closed
11/6/2012	4:51:27 PM	SiCl4 post valve closed
11/6/2012	4:51:27 PM	Main Vac valve closed
11/6/2012	4:51:27 PM	Bypass valve closed
11/6/2012	4:51:27 PM	Bubbler valve closed
11/6/2012	4:51:27 PM	H2 valve opened
11/6/2012	4:51:27 PM	Helium MFC set to  0.000000
11/6/2012	4:51:27 PM	H2 MFC set to  500.000000
11/6/2012	4:51:27 PM	BCl3 MFC set to  0.000000
11/6/2012	4:51:27 PM	PH3 MFC set to  0.000000
11/6/2012	4:51:27 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:51:27 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:51:27 PM	Tube furnace set to 0
11/6/2012	4:52:43 PM	Helium valve closed
11/6/2012	4:52:43 PM	BCl3 valve closed
11/6/2012	4:52:43 PM	PH3 valve closed
11/6/2012	4:52:43 PM	SiCl4 pre valve closed
11/6/2012	4:52:43 PM	SiCl4 post valve closed
11/6/2012	4:52:43 PM	Main Vac valve closed
11/6/2012	4:52:43 PM	Bypass valve closed
11/6/2012	4:52:43 PM	H2 valve opened
11/6/2012	4:52:43 PM	Bubbler valve opened
11/6/2012	4:52:43 PM	Helium MFC set to  0.000000
11/6/2012	4:52:43 PM	H2 MFC set to  500.000000
11/6/2012	4:52:43 PM	BCl3 MFC set to  0.000000
11/6/2012	4:52:43 PM	PH3 MFC set to  0.000000
11/6/2012	4:52:43 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:52:43 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:52:43 PM	Tube furnace set to 0
11/6/2012	4:52:44 PM	Helium valve closed
11/6/2012	4:52:44 PM	BCl3 valve closed
11/6/2012	4:52:44 PM	PH3 valve closed
11/6/2012	4:52:44 PM	SiCl4 pre valve closed
11/6/2012	4:52:44 PM	SiCl4 post valve closed
11/6/2012	4:52:44 PM	Main Vac valve closed
11/6/2012	4:52:44 PM	Bypass valve closed
11/6/2012	4:52:44 PM	H2 valve opened
11/6/2012	4:52:44 PM	Bubbler valve opened
11/6/2012	4:52:44 PM	Helium MFC set to  0.000000
11/6/2012	4:52:44 PM	H2 MFC set to  500.000000
11/6/2012	4:52:45 PM	BCl3 MFC set to  0.000000
11/6/2012	4:52:45 PM	PH3 MFC set to  0.000000
11/6/2012	4:52:45 PM	SiCl4 MFC set to  0.000000
11/6/2012	4:52:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	4:52:45 PM	Tube furnace set to 1000
11/6/2012	5:12:45 PM	Helium valve closed
11/6/2012	5:12:45 PM	PH3 valve closed
11/6/2012	5:12:45 PM	Main Vac valve closed
11/6/2012	5:12:45 PM	Bypass valve closed
11/6/2012	5:12:45 PM	H2 valve opened
11/6/2012	5:12:45 PM	BCl3 valve opened
11/6/2012	5:12:45 PM	SiCl4 pre valve opened
11/6/2012	5:12:45 PM	SiCl4 post valve opened
11/6/2012	5:12:45 PM	Bubbler valve opened
11/6/2012	5:12:45 PM	Helium MFC set to  0.000000
11/6/2012	5:12:45 PM	H2 MFC set to  450.000000
11/6/2012	5:12:45 PM	BCl3 MFC set to  1.000000
11/6/2012	5:12:45 PM	PH3 MFC set to  0.000000
11/6/2012	5:12:45 PM	SiCl4 MFC set to  50.000000
11/6/2012	5:12:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	5:12:45 PM	Tube furnace set to 1000
11/6/2012	5:33:45 PM	Helium valve closed
11/6/2012	5:33:45 PM	BCl3 valve closed
11/6/2012	5:33:45 PM	PH3 valve closed
11/6/2012	5:33:45 PM	SiCl4 pre valve closed
11/6/2012	5:33:45 PM	SiCl4 post valve closed
11/6/2012	5:33:45 PM	Main Vac valve closed
11/6/2012	5:33:45 PM	Bypass valve closed
11/6/2012	5:33:45 PM	H2 valve opened
11/6/2012	5:33:45 PM	Bubbler valve opened
11/6/2012	5:33:45 PM	Helium MFC set to  0.000000
11/6/2012	5:33:45 PM	H2 MFC set to  500.000000
11/6/2012	5:33:45 PM	BCl3 MFC set to  0.000000
11/6/2012	5:33:45 PM	PH3 MFC set to  0.000000
11/6/2012	5:33:45 PM	SiCl4 MFC set to  0.000000
11/6/2012	5:33:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	5:33:45 PM	Tube furnace set to 750
11/6/2012	5:38:45 PM	H2 valve closed
11/6/2012	5:38:45 PM	BCl3 valve closed
11/6/2012	5:38:45 PM	PH3 valve closed
11/6/2012	5:38:45 PM	SiCl4 pre valve closed
11/6/2012	5:38:45 PM	SiCl4 post valve closed
11/6/2012	5:38:45 PM	Main Vac valve closed
11/6/2012	5:38:45 PM	Bypass valve closed
11/6/2012	5:38:45 PM	Helium valve opened
11/6/2012	5:38:45 PM	Bubbler valve opened
11/6/2012	5:38:45 PM	Helium MFC set to  500.000000
11/6/2012	5:38:45 PM	H2 MFC set to  0.000000
11/6/2012	5:38:45 PM	BCl3 MFC set to  0.000000
11/6/2012	5:38:45 PM	PH3 MFC set to  0.000000
11/6/2012	5:38:45 PM	SiCl4 MFC set to  0.000000
11/6/2012	5:38:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	5:38:45 PM	Tube furnace set to 0
11/6/2012	5:58:45 PM	Helium valve closed
11/6/2012	5:58:45 PM	H2 valve closed
11/6/2012	5:58:45 PM	BCl3 valve closed
11/6/2012	5:58:45 PM	PH3 valve closed
11/6/2012	5:58:45 PM	SiCl4 pre valve closed
11/6/2012	5:58:45 PM	SiCl4 post valve closed
11/6/2012	5:58:45 PM	Main Vac valve closed
11/6/2012	5:58:45 PM	Bypass valve closed
11/6/2012	5:58:45 PM	Bubbler valve closed
11/6/2012	5:58:45 PM	Helium MFC set to  0.000000
11/6/2012	5:58:45 PM	H2 MFC set to  0.000000
11/6/2012	5:58:45 PM	BCl3 MFC set to  0.000000
11/6/2012	5:58:45 PM	PH3 MFC set to  0.000000
11/6/2012	5:58:45 PM	SiCl4 MFC set to  0.000000
11/6/2012	5:58:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	5:58:46 PM	Tube furnace set to 0
11/6/2012	5:58:47 PM	Run finished at 5:58 PM
11/6/2012	6:01:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2012	6:01:14 PM	Recipe started at 6:01 PM
11/6/2012	6:01:14 PM	Helium valve closed
11/6/2012	6:01:14 PM	H2 valve closed
11/6/2012	6:01:14 PM	BCl3 valve closed
11/6/2012	6:01:14 PM	PH3 valve closed
11/6/2012	6:01:14 PM	SiCl4 pre valve closed
11/6/2012	6:01:14 PM	SiCl4 post valve closed
11/6/2012	6:01:14 PM	Main Vac valve closed
11/6/2012	6:01:14 PM	Bubbler valve closed
11/6/2012	6:01:14 PM	Bypass valve opened
11/6/2012	6:01:14 PM	Helium MFC set to  0.000000
11/6/2012	6:01:14 PM	H2 MFC set to  0.000000
11/6/2012	6:01:14 PM	BCl3 MFC set to  0.000000
11/6/2012	6:01:14 PM	PH3 MFC set to  0.000000
11/6/2012	6:01:14 PM	SiCl4 MFC set to  0.000000
11/6/2012	6:01:14 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	6:01:14 PM	Tube furnace set to 0
11/6/2012	6:02:26 PM	Helium valve closed
11/6/2012	6:02:26 PM	H2 valve closed
11/6/2012	6:02:26 PM	BCl3 valve closed
11/6/2012	6:02:26 PM	PH3 valve closed
11/6/2012	6:02:26 PM	SiCl4 pre valve closed
11/6/2012	6:02:26 PM	SiCl4 post valve closed
11/6/2012	6:02:26 PM	Main Vac valve closed
11/6/2012	6:02:26 PM	Bubbler valve closed
11/6/2012	6:02:26 PM	Bypass valve opened
11/6/2012	6:02:26 PM	Helium MFC set to  0.000000
11/6/2012	6:02:26 PM	H2 MFC set to  0.000000
11/6/2012	6:02:26 PM	BCl3 MFC set to  0.000000
11/6/2012	6:02:26 PM	PH3 MFC set to  0.000000
11/6/2012	6:02:26 PM	SiCl4 MFC set to  0.000000
11/6/2012	6:02:26 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	6:02:26 PM	Tube furnace set to 0
11/6/2012	6:03:26 PM	Helium valve closed
11/6/2012	6:03:26 PM	H2 valve closed
11/6/2012	6:03:26 PM	BCl3 valve closed
11/6/2012	6:03:26 PM	PH3 valve closed
11/6/2012	6:03:26 PM	SiCl4 pre valve closed
11/6/2012	6:03:26 PM	SiCl4 post valve closed
11/6/2012	6:03:26 PM	Bypass valve closed
11/6/2012	6:03:26 PM	Bubbler valve closed
11/6/2012	6:03:26 PM	Main Vac valve opened
11/6/2012	6:03:26 PM	Helium MFC set to  0.000000
11/6/2012	6:03:26 PM	H2 MFC set to  0.000000
11/6/2012	6:03:26 PM	BCl3 MFC set to  0.000000
11/6/2012	6:03:26 PM	PH3 MFC set to  0.000000
11/6/2012	6:03:26 PM	SiCl4 MFC set to  0.000000
11/6/2012	6:03:26 PM	Bypass solenoid MFC set to  0.000000
11/6/2012	6:03:26 PM	Tube furnace set to 0
11/6/2012	6:03:27 PM	Run finished at 6:03 PM
11/6/2012	6:03:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
